G10-SiC :: AIXTRON

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Deposition Systems for Compound Semiconductors

G10-SiC

150/200 mm high throughput epitaxy for SiC Power Electronics

Dual wafer size batch reactor

G10-SiC

150 mm and 200 mm – dual wafer size capable – safeguard your investment into the future
Highest wafer output / m² in the market
Lowest cost / wafer in the market
Excellent run-to-run process performance
Highly uniform, low defect SiC epitaxy processes for maximum chip yield

G10-SiC

Planetary Reactor® for 9 x 150 mm & 6 x 200 mm

Your benefits

Single wafer performance in batch configuration
Best in class productivity
Best in class epi cost

Our solutions

Fully automated wafer loading (C2C)
Individual wafer Gas Foil Rotation (GFR)
Automated Top side wafer Temperature Control (TTC) for optimized batch processing
Largest reactor capacity (9 x 150 mm & 6 x 200 mm)
High growth rate SiC processes
Hot wafer transfer and fast thermal reactor cycling
Best in class wafer throughput per m2 fab space efficacy
Low consumable cost per wafer
Highest efficiency in gas & power consumption per wafer

AIXTRON SiC application lab services

Operation of 4 systems for 150/200 mm SiC process development
Full material characterization capabilities supported by Fraunhofer Institute, Germany
Customer support through SiC process demonstration/developments and training

G10-SiC: 200 mm uniformity

G10-SiC: 150 mm uniformity

Broschüre

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Ihr Ansprechpartner

Marketing

Dr. Frank Wischmeyer

Vice President Silicon Carbide

Phone: +49 (0) 2407 9030-780

Send e-mail

B ack to product overview

Sales

Alan Tai
Taiwan/Singapore

Tel: +886 3 571 2678 ext. 101

Christof Sommerhalter
USA

Tel: +1 669-228 ext. 3893

Christian Geng
Europe

Tel: +49 (2407) 9030 -135

Hisatoshi Hagiwara
Japan

Tel: +81 3-5781-0935 ext. 510

Nam Kyu Lee
South Korea

Tel: +82 31 371 ext. 3011

Wei (William) Song
China

Tel: +86 2164453226 ext. 101

Service

AIXTRON SE (Headquarters)

Tel: +49 (2407) 9030-0

AIXTRON 24/7 Technical Support Line

Tel: +49 (2407) 9030-999

AIXTRON Europe

Tel: +49 (2407) 9030-9037

AIXTRON Ltd (UK)

Tel: +44 (1223) 519-444

AIXTRON K.K. (Japan)

Tel: +81 3 5781 0931

AIXTRON Korea Co., Ltd.

Tel: +82 (31) 371-3000

AIXTRON Taiwan Co., Ltd. (Main Office)

Tel: +886 3 571 2678

AIXTRON Inc. (USA)

Tel: +1 (669) 228-3759

Produkte

Vincent Meric
Vice President Marketing

Tel: +49 (0) 2407 9030-9022

Karriere

Laura Preinich
Recruiter

Tel: +49 (2407) 9030 0

Tom Lankes
Talent Acquisition Expert - Ausbildungsleitung

Tel: +49 (2407) 9030 0

Nachhaltigkeit

Christoph Pütz
Senior Manager ESG & Sustainability

Tel: +49 (0) 2407 9030-5968

Investor Relations

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Tel: +49 (2407) 9030-444

Ralf Penner
Senior IR Manager

Tel: +49 (2407) 9030-6153

Forschung & Entwicklung

Prof. Dr. Michael Heuken
Vice President Advanced Technologies

Tel: +49 (2407) 9030-335

Presse & Öffentlichkeitsarbeit

Christian Ludwig
Vice President Investor Relations & Corporate Communications

Tel: +49 (2407) 9030-444

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Service/Kundendienst