Osaka University Selects AIXTRON System for Novel Biosensors

Professor Matsumoto and Assistant Professor Maehashi will lead the researchers at the Department of Semiconductor Electronics of the Institute of Scientific and Industrial Research (ISIR) to use the new equipment to produce carbon nanotube (CNT) and graphene structures for bio-sensors. The aim is to combine graphene field-effect transistors with organic chemicals, such as antibodies, antigens and aptamers to allow electrical detection of specific proteins. The BM Pro system will also be used to produce carbon nanotubes for micro-electromechanical-systems (MEMS) and energy storage devices.

Dr. Ken Teo, Director of Nanoinstruments at AIXTRON, reports: “Our system was chosen by Osaka University because it offers a cost-effective, turn-key solution that enables researchers to spend more time on device specifics as we take care of the CVD process complexity. The ease of use, flexibility and proven recipes of the BM Pro system allows customers to reliably grow several types of nanotubes and graphene in a reproducible manner. This is ideal for device development where process stability is a must. Our technology allows easy process transfer into large- scale production on 300 mm wafers by using the BM 300T system.”

AIXTRON's BM Pro system incorporates high performance heaters with ramp rates up to 300°C/minute, top side wafer temperature control, pulsed plasma and automatic process recipes. The equipment is therefore perfectly suited to meet the need for growing different types of graphene and carbon nanotubes with high consistent quality. Designed for a multi-user laboratory, the system provides detailed data recording functions, safety interlocks and an integrated reactor camera for safe process viewing.

*BM system = former Black Magic system