AIXTRON CRIUS II qualified in Taiwan

Chi Mei was the first customer in Taiwan to receive the new system. The 55x2-inch wafer configuration CCS CRIUS II was installed and commissioned by the local AIXTRON service team at facilities near the Southern Taiwan Science Park. Since then the team has been working closely with the customer to expedite the qualification process.

A company representative remarked that it has been a seamless transition from the CRIUS to the CRIUS II due to the system’s straightforward process transfer capabilities - the unique Close Coupled Showerhead reactor chamber technology simply requires the application of area-scaling factors. This qualified system will shortly be fully operational and will provide the shortest time-to-market for its family of HB-LED products.

The CRIUS II can easily be tuned to the optimum performance and can further be converted from 2- to 4-, 6-inch or larger wafer size production, an important factor for GaN LED manufacturing. Since larger wafer sizes play a crucial role in reducing the manufacturing cost in LED production, the CRIUS II is the best option to increase the productivity of HB-LED manufacturing. Compared to the CRIUS, the CRIUS II reactor capacity has been increased from 31x2-inch to 55x2-inch wafers. Alternatively, the CRIUS II reactor chamber can accommodate as many as 13x4-inch wafers.

Our registered trademarks: AIXACT®, AIXTRON®, Atomic Level Solutions®, Close Coupled Showerhead®, CRIUS®, EXP®, EPISON®, Gas Foil Rotation®, Optacap™, OVPD®, Planetary Reactor®, PVPD®, STExS®, Trijet®